All Plasmas

Microwave Plasma Sources

Optimisation of Microwave Plasma Sources with the transient, frequency domain and eigenmode solvers of MAFIA. Read full article..

Development of VHF Inductively Coupled Plasma (ICP) Source

In this presentation CST MICROWAE STUDIO was used for plasma uniformity prediction through the E/H-field and power loss distribution. The plasma source S-parameter are analysed and the impedance-matching-network for different antenna is designed. Finally a high-frequency & large-area plasma source is analysed. Dr. Hyun-su Jun, KAIST, Low-temperature plasma lab. Presentation on the Korean CST User Group Meeting 2009. Read full article..