Title:
Micromachined 38 GHz cavity resonator and filter with rectangular-coaxial feed-lines
Author(s):
Y. Wang M. Ke M.J. Lancaster
Source:
IET Microw. Antennas Propag.
Vol./Issue/Date:
Vol. 3, Iss. 1, 28.05.2008
Year:
2009
Page(s):
125-129
Keywords:
Abstract:
Micromachined, multilayer cavity resonators and filters at 38 GHz are demonstrated. Each layer is made
of gold-coated silicon, structured by deep reactive etching. Two external coupling structures by coaxial feed lines
are proposed to suit the fabrication process. The measured resonator gives an unloaded Q-value of 343 at 38 GHz.
Methods to further improve the resonator quality-factors are discussed. The measured insertion loss of the filter
is 1.01 dB, the 3 dB bandwidth is from 36.53 to 39.13 GHz, and the return loss is better than 215 dB over the
frequency range from 37.0 to 38.6 GHz.
Document:
Reference Id:
417
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