CST – Computer Simulation Technology

Application of Silicon Micromachining Techniques for the Manufacturing of New Passive THz-Components

Title:
Application of Silicon Micromachining Techniques for the Manufacturing of New Passive THz-Components
Author(s):
Stephan Biber, Jan Sch¨ur, Lorenz-Peter Schmidt
Source:
German Microwave Conference - GeMiC 2006 -
Vol./Issue/Date:
1st January 0001
Year:
2006
Page(s):
4
Abstract:
We present an overview on the application of silicon micromachining techniques to the fabrication of THz components. Different machining techniques will be discussed with respect to their capability to generate complex 3-dimensional geometries and to meet the high mechanical tolerance requirements for THz-components. In order to demonstrate the potential of the technology, results for the application of micromachining techniques to the design of new THz-components will be discussed. Two different components such as a quasi-optical filter at 2.5 THz and a horn antenna at 600 GHz will be discussed exemplarily. We will emphasize the potential of silicon based micro-structures for the manufacturing of new devices.
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