Design, Simulation, and Fabrication of an On-Chip Antenna Fabricated Using Silicon Micromachining for Broad-Band Millimeter-Wave Wireless Communications
Hojr Sedaghat-Pisheh, Mahmoud Shahabadi, Shamsodin Mohajerzadeh
Proceedings of the 36th European Microwave Conference
Design, simulation, and fabrication of a broadband coplanar-waveguide(CPW)-fed on-chip antenna will be presented. The antenna is of slot type and has the shape of a bow-tie with rounded truncation. The antenna is designed for unlicensed 60 GHz band, i.e., 58-64 GHz for millimeter-wave (mm-wave) communications. To maximize the radiation
efficiency of the antenna, we have used bulk micromachining method for low-resistivity silicon. Simulation results of the antenna using 3D finite integral technique are presented.
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