Micromachined 38 GHz cavity resonator and filter with rectangular-coaxial feed-lines
Y. Wang M. Ke M.J. Lancaster
IET Microwaves, Antennas & Propagation
Volume: 3, Issue: 1, February 2009
Micromachined, multilayer cavity resonators and filters at 38 GHz are demonstrated. Each layer is made of gold-coated silicon, structured by deep reactive etching. Two external coupling structures by coaxial feed lines are proposed to suit the fabrication process. The measured resonator gives an unloaded Q-value of 343 at 38 GHz.
Methods to further improve the resonator quality-factors are discussed. The measured insertion loss of the filter is 1.01 dB, the 3 dB bandwidth is from 36.53 to 39.13 GHz, and the return loss is better than 215 dB over the frequency range from 37.0 to 38.6 GHz.
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