CST – Computer Simulation Technology

Title:
Micromachined Thick Mesh Filters for Millimeter-Wave and Terahertz Applications
Author(s):
Yi Wang, Bin Yang, Yingtao Tian, Robert S. Donnan, Michael J. Lancaster
Source:
IEEE Transactions on Terahertz Science and Technology
Vol./Issue/Date:
Volume: 4, Issue: 2, March 2014
Year:
2014
Page(s):
247 - 253
Keywords:
Filters, frequency-selective surfaces (FSSs), micromachining, millimeter-wave (mm-wave) devices
Abstract:
This paper presents several freestanding bandpass mesh filters fabricated using an SU-8-based micromachining technique. The important geometric feature of the filters, which SU8 is able to increase, is the thickness of the cross-shaped micromachined slots. This is five times its width. This thickness offers an extra degree of control over the resonance characteristics. The large thickness not only strengthens the structures, but also enhances the resonance quality factor ( -factor). A 0.3-mm-thick, single-layer, mesh filter resonant at 300 GHz has been designed and fabricated and its performance verified. The measured -factor is 16.3 and the insertion loss is 0.98 dB. Two multi-layer filter structures have also been demonstrated. The first one is a stacked structure of two single mesh filters producing a double thickness, which achieved a further increased -factor of 27. This is over six times higher than a thin mesh filter. The second multilayer filter is an electromagnetically coupled structure forming a two-pole filter. The coupling characteristics are discussed based on experimental and simulation results. These thick mesh filters can potentially be used for sensing and material characterization at millimeter-wave and terahertz frequencies.
Document:

Back to References

contact support

Your session has expired. Redirecting you to the login page...

We use cookie to operate this website, improve its usability, personalize your experience, and track visits. By continuing to use this site, you are consenting to use of cookies. You have the possibility to manage the parameters and choose whether to accept certain cookies while on the site. For more information, please read our updated privacy policy


Cookie Management

When you browse our website, cookies are enabled by default and data may be read or stored locally on your device. You can set your preferences below:


Functional cookies

These cookies enable additional functionality like saving preferences, allowing social interactions and analyzing usage for site optimization.


Advertising cookies

These cookies enable us and third parties to serve ads that are relevant to your interests.