CST – Computer Simulation Technology

The multipole resonance probe: characterization of a prototype

Title:
The multipole resonance probe: characterization of a prototype
Author(s):
Martin Lapke, Jens Oberrath, Christian Schulz, Robert Storch, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes
Source:
Plasma Sources Science and Technology
Vol./Issue/Date:
Volume: 20, Issue: 4, 22 October 2010
Year:
2011
Page(s):
1-4
Abstract:
The multipole resonance probe (MRP) was recently proposed as an economical and industry compatible plasma diagnostic device (Lapke et al 2008 Appl. Phys. Lett. 93 051502). This communication reports the experimental characterization of a first MRP prototype in an inductively coupled argon/nitrogen plasma at 10 Pa. The behavior of the device follows the predictions of both an analytical model and a numerical simulation. The obtained electron densities are in excellent agreement with the results of Langmuir probe measurements.
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