CST – Computer Simulation Technology

The multipole resonance probe: characterization of a prototype
Martin Lapke, Jens Oberrath, Christian Schulz, Robert Storch, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes
Plasma Sources Science and Technology
Volume: 20, Issue: 4, 22 October 2010
The multipole resonance probe (MRP) was recently proposed as an economical and industry compatible plasma diagnostic device (Lapke et al 2008 Appl. Phys. Lett. 93 051502). This communication reports the experimental characterization of a first MRP prototype in an inductively coupled argon/nitrogen plasma at 10 Pa. The behavior of the device follows the predictions of both an analytical model and a numerical simulation. The obtained electron densities are in excellent agreement with the results of Langmuir probe measurements.

Back to References

contact support

Your session has expired. Redirecting you to the login page...

We use cookie to operate this website, improve its usability, personalize your experience, and track visits. By continuing to use this site, you are consenting to use of cookies. You have the possibility to manage the parameters and choose whether to accept certain cookies while on the site. For more information, please read our updated privacy policy

Cookie Management

When you browse our website, cookies are enabled by default and data may be read or stored locally on your device. You can set your preferences below:

Functional cookies

These cookies enable additional functionality like saving preferences, allowing social interactions and analyzing usage for site optimization.

Advertising cookies

These cookies enable us and third parties to serve ads that are relevant to your interests.