Micromachined 300-GHz SU-8-Based Slotted Waveguide Antenna
Yi Wang, Maolong Ke, Michael J. Lancaster, Jian Chen
IEEE Antennas and Wireless Propagation Letters
Volume: 10, 2011
Micromachining, millimeter-wave waveguides, slot arrays, waveguide bends
A micromachined 300-GHz slotted waveguide antenna is demonstrated using a simple fabrication technique based on metal-coated SU-8 thick resist. The antenna is designed to be built from a four-layer structure of equal layer thickness. It is fully characterized, and the measured radiation patterns show excellent agreement with the simulation. An H-plane matched right-angle bend is integrated in the antenna in order to achieve reliable and accurate connection with standard waveguide flange. The micromachined antenna is directional and low-profile and may find applications in low-cost sensors and radars.
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